• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The present invention relates to a vaporized soil (1) for a substrate coating apparatus that is heated by direct energization in a coating chamber. The vaporized pack 1 includes a cavity 2 for confining a molten metal of vaporized metal and a raw metal wire supplying a metal to be melted and vaporized by the vaporized pack 1 in the form of a wire 5. . The metal wire 5 is melted on the heating surface 4 of the dissolution island 3 located higher than the bottom surface 6 of the cavity 2. The heating surface 4 is lower in temperature than the bottom surface 6 of the cavity 2 due to the shape of the vaporized bag 1 or the material. The molten metal melted on the heating surface 4 flows down into the cavity 2.
    公开号:KR20030062243A
    申请号:KR10-2003-0000766
    申请日:2003-01-07
    公开日:2003-07-23
    发明作者:군터피셔；군터클렘；안드레아스웨이스
    申请人:어플라이드 필름스 게엠베하 운트 컴퍼니 카게；
    IPC主号:
    专利说明:

    Vaporized bag for substrate coating equipment {Verdampferschiffchen fur eine Vorrichtung zur Beschichtung von Substraten}
    [8] The present invention relates to a vaporization bag for covering a substrate in a coating chamber, wherein the vaporization bag can be heated by direct energization and has a cavity having a bottom surface for confining a molten metal to be vaporized. And a raw metal wire which is supplied in the form of a wire to the metal to be melted and vaporized by the vaporization bag.
    [9] A vaporization pack as described above is disclosed in DE 41 39 792 A1. In such vaporized earthenware, the metal wire to be melted is usually supplied to the cavity at the central portion of the vaporized earthenware, where the end of the metal wire is heated and melted. The patent deals with the problem that molten metal drops off from the supply metal wire and droplets, causing droplets to be delivered to the wrong spot on the substrate to be deposited. In band coating, the droplets may also cause scratches on the surface of the band. The droplet is formed according to DE 41 39 792 A1 by forming the vaporizing earthquake and its cavity with a width greater than the width of both ends of the intermediate area to which the metal wire is supplied, and connecting the power supply through both ends of the vaporizing earthquake. Attempts have been made to prevent the risk of particles being formed. As such, the relatively wide width of the intermediate portion increases the cross-sectional area of the portion, which results in smaller electrical resistance than in the other portions on both sides. By doing so, the temperature near the feed metal wire of the vaporized earthbag is lower than the rest, preventing splash formation due to too fast melting.
    [10] It is a disadvantage in the known vaporization pack that the shape is trapezoidal when viewed from above in order to be able to lower the temperature in the middle part. Therefore, since the vaporized tortoise takes up more space on the side, it is particularly disadvantageous when a plurality of vaporized tortoises must be installed side by side in the coating apparatus to generate metal mist over a wider range. When manufacturing the known vaporized earthenware, the material required is to produce one mass of material corresponding to the maximum width of the vaporized earthenware. Therefore, the material loss is inevitably large during manufacturing. Such vaporized packs are made of expensive materials (Titanborit and Bornitrit) and are expensive because they have to be replaced regularly due to wear in the cladding.
    [11] Accordingly, the object of the present invention is to implement a vaporized pack that can fuse the supply metal wire without generating a splash material, as described above, without having to form the vaporized pack wider than a general vaporized pack.
    [12] The problem is that the vaporized earthenware for melting the metal wire has a heating surface located higher than the bottom surface of the cavity, the heating surface is the bottom surface of the cavity by the shape of the vaporized earthenware or material within the heating surface range This is solved by maintaining a lower temperature and forming a vaporization pack so that the molten metal flows into the cavity on the heating surface.
    [13] In doing so, the distance from the cavity when the feed metal wire is melted is further separated from the prior art, and the molten metal first falls on the hot portion of the cavity or on the melting material in the cavity. To fall on the heating surface. Since the heating surface is located higher than the bottom of the cavity, the temperature of the heating surface automatically has a lower temperature than the other parts of the vaporization bottle, so that splashes of relatively cold metal droplets falling on the hot portion of the vaporization bag do not occur at all. . When the metal droplets are introduced into the cavity from the heating surface, the metal droplets are uniformly heated so that they do not scatter when they fall on the melt in the cavity. In addition, the fusion tank is very stable because only a portion of the heating current flows in the fusion tank than the rest of the vaporization earthquake. Therefore, the present invention can prevent the scratches of the band due to the splash material on the deposited material and the splash material in the band coating equipment. The present invention allows full continuous melting without dropping under different traveling speeds (eg 500-2000 mm / min) and diameters (eg 1.0 mm-2.0 mm) of the metal wire. For example, even in a supply section of a relatively long metal wire between 100 and 200 mm, no disturbance is caused to uniform melting. The embodiment according to the invention also makes the radiation load on the substrate to be coated small, contributing to energy saving for the coating process.
    [14] In addition, due to the inherently low temperature, the wear rate of the metal wire contact portion is reduced in comparison with the known devices. The life of the vaporized earthworm pack is further improved by the movement of the less severe dissolution bath and the uniform distribution of the melt in the cavity.
    [15] It is particularly advantageous to place the heating surface on a melt island protruding from the cavity. Such melt islands can be made very simply, and because the melt island site serves to provide additional cross-sectional area for the heating current, electrical heating is relatively low at this site, which is particularly stable at the melt island site. Provide a melting tank. According to the present invention, it is simple to supply and position the metal wire because the metal wire does not need to be melted and dropped to the cavity, but only to the heating surface.
    [16] When the dissolution island is symmetrically arranged in the middle of the cavity, the molten metal dissolved from the metal wire is uniformly distributed over the entire surface of the cavity without the need for a special device.
    [17] If the melted island is formed by raising the bottom of the cavity according to another embodiment, the melted island can be manufactured at a very low cost and does not essentially increase the manufacturing cost of the vaporized earthworm pack.
    [18] If the melted island is installed on the bottom surface of the cavity as a separate component, it is possible to retrofit the existing vaporized earthenware to the vaporized earthenware according to the present invention. Such an embodiment additionally provides the advantage that the temperature difference with respect to the bottom surface of the cavity can be controlled through the material selection of the melt island, or forming a pedestal of the melt island on the bottom surface of the cavity, or by means of an intermediate layer. It allows for adaptation to different vaporization conditions and replacement of the melted islands if the melted islands wear out earlier than the rest of the vaporized earthworm.
    [19] On both sides of the melt island, between the cavity and the longitudinal edges of the melt island, both sides of the same size (dimension) passage groove for connecting the cavity portions located before and after the melt island back and forth with each other Formed and left at the level of the molten metal in the cavities on both sides of the melted island are automatically equal.
    [20] According to another embodiment of the present invention, the dissolution islands have outflow surfaces formed to be inclined to obliquely incline the front and rear sides of the dissolution islands in the longitudinal direction of the cavity to be connected to the cavity, and the heating surface is the main part of the cavity. When formed in the shape of a trough arch in the direction, the molten metal molten metal first collects on the melted island and then smoothly flows through the inclined surface into the cavity to prevent splashing.
    [21] However, for a specific molten metal, it may be advantageous that the vaporized surface of the molten island is formed in a plane, and the outflow surface reaching the cavity is inclined obliquely in all directions.
    [22] If the melted island is made of a material having a higher electrical resistance than the material of the rest of the vaporized earthworm, the current flowing through the melted island and the amount of heating heat due to the current are reduced.
    [23] If there is a risk that the metal wire material to be dissolved contains impurities, it may be planned to install an inhibitor on the heating surface to prevent impurities floating on the molten metal. This prevents impurity from reaching the cavity. This impurity will rather collect on the heating surface and should be removed when the coating device is stopped.
    [24] The present invention provides various embodiments. One embodiment will now be described in detail with reference to the basic principle of the present invention.
    [1] The accompanying drawings are perspective views showing the vaporization bag 1 according to the present invention.
    [2] * Description of Signs of Main Parts of Drawings *
    [3] Vaporized Earthenware (1) Joint Parts (2)
    [4] Melt Island (3) Heating Surfaces (Fusing Surfaces) (4)
    [5] Metal Wire (5) Front Surface (6)
    [6] Connecting Groove (7) Connection Groove (8)
    [7] Outflow Surface (9) Outflow Surface (10)
    [25] The accompanying drawings are perspective views showing the vaporized bag 1 installed in a coating chamber not shown in the drawings together with various vaporized bags according to the present invention. In order to heat the vaporized pack 1, it is heated by energizing by connecting both ends of the vaporized pack 1 to a power source in a similar manner not shown in the drawing.
    [26] On the upper surface of the vaporized bag 1 is formed a cavity 2 which occupies most of the surface, which contains metal to be vaporized when the vaporized bag 1 is operated. What is important in the present invention is the dissolved island 3 located in the middle of the cavity 2. The dissolution island 3 has a heating surface 4 forming its upper surface, which serves to melt the metal wire 5, wherein the metal wire 5 is a conventional method. The end melts on the heating surface 4 of the melting island 3 while being fed continuously.
    [27] The dissolution island 3 may be formed by raising the bottom 6 of the cavity 2. However, it is also possible to install the melted island 3 on the bottom surface 6 as an independent component. By doing so, connecting grooves 7 and 8 are formed in both sides of the melting island 3 in the cavity 2, and are located before and after the melting island 3 through the connecting grooves 7, 8. The front part and the rear part of the cavity 2 are connected to each other.
    [28] In the embodiment shown in the figure, the heating surface 4 is formed in the shape of a V-shaped trough, wherein both edges of the heating surface 4 parallel to the longitudinal direction of the vaporization bag 1 are higher than the middle part. Formed. The discharging islands 3 are formed with outflow surfaces 9 and 10 which are inclined into the cavity 2 obliquely toward the front and the rear, respectively. By this structure, the molten metal melted from the metal wire 5 flows into the cavity 2 from the heating surface 4 through the outflow surfaces 9 and 10, respectively, forwardly and backwardly. The heating surface is also equipped with one ridge (not shown), each of which serves to suppress impurities in the molten metal at the front and back.
    [29] It is likewise not shown that the melting surface 4 can also be flattened. In that case, it is possible to form the outflow surfaces reaching the cavity 2 inclined obliquely in all directions as in the outflow surfaces 9 and 10. In most cases, without using the inclined outflow surfaces 9 and 10, a block having a main shape may be installed as the melting island 3.
    权利要求:
    Claims (10)
    [1" claim-type="Currently amended] In the coating chamber, the vaporized earthenware bag 1 can be heated by direct energization, and the vaporized earthenware bag 1 has a cavity 2 in which a bottom face 6 is formed for confining a molten metal to be vaporized. In the vaporization bag (1) for the substrate coating apparatus having a raw metal wire which is supplied by the vaporization bag (1) to be melted and vaporized in the form of a wire (5),
    The vaporized earthenware pack 1 has a heating surface 4 located higher than the bottom surface 6 of the cavity 2 in order to melt the metal wire 5, and in this heating surface 4 portion. Due to the shape of the vaporized bag 1 or the material, the temperature is lower than the bottom surface 6 of the cavity 2, and the vaporized bag 1 has a molten metal on the heating surface 4 to the cavity 2. Vaporized pack for substrate coating apparatus, characterized in that formed to be introduced.
    [2" claim-type="Currently amended] The method of claim 1,
    And said heating surface (4) is mounted on a melted island (3) raised from said cavity (2).
    [3" claim-type="Currently amended] The method of claim 2,
    The dissolution island (3) is a vaporized bag for the substrate coating apparatus, characterized in that the symmetrical arrangement in the middle portion of the cavity (2).
    [4" claim-type="Currently amended] In at least one of the preceding claims,
    The dissolution island (3) is a vaporized earthenware pack for the substrate coating apparatus, characterized in that formed by raising the bottom (6) of the cavity (2).
    [5" claim-type="Currently amended] In at least one of the preceding claims,
    The dissolution island (3) is a vaporized bag for the substrate coating apparatus, characterized in that it is constructed on the bottom surface (6) of the cavity (2) as an independent component.
    [6" claim-type="Currently amended] In at least one of the preceding claims,
    The same size connecting the cavities 2 and the portions of the cavities 2 located before and after the melt islands 3 between the longitudinal edges of the melt islands 3 on both sides of the melt islands 3. Vaporized armor for the substrate coating device, characterized in that to form a leaving groove.
    [7" claim-type="Currently amended] In at least one of the preceding claims,
    The discharging islands 3 have outflow surfaces 9 and 10 formed so that the front and rear surfaces of the dissolving island 3 are obliquely inclined in the longitudinal direction of the cavity 2 so as to be in contact with the cavity 2 . And said heating surface (4) is formed in an arcuate shape of a trough in the circumferential direction of the cavity (2).
    [8" claim-type="Currently amended] In at least one of the preceding claims,
    The heating surface 4 of the dissolution island 3 is formed flat and inclined in all directions to form the outflow surfaces 9 and 10 in contact with the cavity 2. Vaporized pack.
    [9" claim-type="Currently amended] In at least one of the preceding claims,
    The melted island (3) is a vaporized bag for a substrate coating apparatus, characterized in that made of a material having a higher electrical resistance than the material of the rest of the vaporized bag (1).
    [10" claim-type="Currently amended] In at least one of the preceding claims,
    And said heating surface (4) is equipped with an inhibiting device for inhibiting impurities floating on the molten metal.
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    同族专利:
    公开号 | 公开日
    CN1239735C|2006-02-01|
    DE10200909A1|2003-07-24|
    EP1327699A1|2003-07-16|
    CN1432660A|2003-07-30|
    JP2003213403A|2003-07-30|
    KR100614127B1|2006-08-23|
    EP1327699B1|2004-10-27|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    2002-01-12|Priority to DE2002100909
    2002-01-12|Priority to DE10200909.0
    2003-01-07|Application filed by 어플라이드 필름스 게엠베하 운트 컴퍼니 카게
    2003-07-23|Publication of KR20030062243A
    2006-08-23|Application granted
    2006-08-23|Publication of KR100614127B1
    优先权:
    申请号 | 申请日 | 专利标题
    DE2002100909|DE10200909A1|2002-01-12|2002-01-12|Evaporator boat for a device for coating substrates|
    DE10200909.0|2002-01-12|
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